Exhaust gas treatment equipment
Today's world is changing with each passing day. Semiconductors have penetrated into every aspect of people's lives, and everything in life cannot be separated from semiconductors. In the semiconductor manufacturing process, various processes require the use of chemical gases, and various volatile chemical liquids are also required in the cleaning process. The pollution caused in these processes will cause very serious pollution to the environment if it is discharged directly.
To this end, Kunshan Zhicheng Automation Co., Ltd. has established a research and development team for exhaust gas treatment. After 3 years, it has developed wet, dry, plasma and other exhaust gas treatment equipment.
1. The water-washing exhaust gas processor uses water to absorb and treat the exhaust gas to treat the exhaust gas generated in the semiconductor process and discharge it after meeting the national emission standards. At the same time, some gases can also be recycled, such as NH3, HCL, etc. When the equipment treats tail gas, it has high efficiency, the highest efficiency can reach 98%; the cost of raw materials is low, only water is needed; the ammonia water generated after absorption can be recycled, etc.
2. The dry exhaust gas processor mainly uses adsorbents to absorb the exhaust gas generated in the semiconductor process, so that it can meet the national emission standards. The adsorbent in the adsorption cylinder can effectively absorb the toxic corrosive gas generated in the equipment in the semiconductor manufacturing process. The pressure difference generated is fed back to the control system by the pressure gauge, and the control system responds and automatically switches to the auxiliary adsorption cylinder, thereby eliminating the toxic corrosion gas. Gas absorption treatment. Adsorbed gases include SiHCl3, B2H6, PH3, H2S, CO, CO2, SO2, CS2, CL4, H2CCL2 acetone, ethanol, benzene, toluene, styrene, odorous substances, etc. The processing efficiency is very high, the highest processing efficiency can reach 98%.
3. The electric heating water washing exhaust gas processor can be used to deal with the toxic gas produced in the semiconductor process. Its main principle is to heat and pyrolyze the tail gas first, and then wash the tail gas with water to make it meet the national emission standard. The equipment has a very good treatment effect for some toxic gases, especially for flammable gases such as SIH4, B2H6, etc. The equipment is equipped with multiple safety facilities and can be used for exhaust gas treatment after various processes in the semiconductor industry.