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Electric heating water washing exhaust processor
- Description
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The electric heating water washing exhaust gas processor can be used to deal with the toxic gas produced in the semiconductor process. Its main principle is to heat and pyrolyze the tail gas first, and then wash the tail gas with water to make it meet the national emission standard. The equipment has a very good treatment effect for some toxic gases, especially for flammable gases such as SIH4, B2H6, etc.
The equipment is equipped with multiple safety facilities and can be used for exhaust gas treatment after various processes in the semiconductor industry.
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