PRODUCTS
Wafer Single Wafer Cleaner
- Description
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This product is specially designed for advanced cleaning and etching, suitable for front-end and back-end processes, 2/4/6/8 chambers can be customized according to customer needs, the maximum processing speed of a single chamber can reach 35 pieces/hour, suitable for 2 /4/6/8 inch Si/SiC/InP/GaAs/GaN and other wafer cleaning, etching, deglue and other processes. It integrates sophisticated chemical liquid proportioning system and waste liquid recovery confirmation system, and fully supports SECS/GSM communication protocol.
Category:
Products
Contact us
Address: No. 889 Zhonghua Road, Bacheng Town, Kunshan City,
Jiangsu Province, China
Customer service hotline：
0512-57762325 0512-55239392
Fax：0512-55239392
Website：www.kszcauto.cn
E-mail：zcauto@yeah.net
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