PRODUCTS
Spin Scrubber
- Description
-
Applications: wafer fabrication and advanced packaging
Wafer size: 100 mm~ 300 mm
Features & configurations:
2~4 load ports
4~8 cleaning chambers
Wafer flip function, front size and back side cleaning in sequence
Configured with back side and edge scrubber
N2 atomizing two-fluid cleaningProcess specifications:
PA ≤20ea@0.09μm
PRE ≥97%@0.09μm
metal contamination ≤5E9 atoms/cm2
Category:
Products
Contact us
Address: No. 889 Zhonghua Road, Bacheng Town, Kunshan City,
Jiangsu Province, China
Customer service hotline：
0512-57762325 0512-55239392
Fax：0512-55239392
Website：www.kszcauto.cn
E-mail：zcauto@yeah.net
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