PRODUCTS
Slurry Dispense System
- Description
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Applications:
Drum/Tote/Buffer tank system
High precision scale acid mixing and multiple quality inspection instruments, providing high accuracy acid mixing capacity
Redundant pump and quality inspection instruments, providing highly stable acid supply capacity
Configurations:
Standard or customized design&manufacture.
100% manufactured in original factory
SEMI standard
Features:
Perfect performance
Easy installation
Little maintenance requirement
Dual loop design
Patent protectionChemical VMB Assembly
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Applications:
Installed in sub-fab and CMP nearby zone
Acid mixing and supply of grinding fluid
Configurations
Redundant pump and tank design, providing uninterrupted mixing/supply function
Redundant filter design, which supports filter change and maintenance without system offline
Detection of mixed acid quality with conductivity meter
High precision H202 scale, providing higher quality of mixed acid
Double raw material barrels and double pumps design, ensure the stable supply of raw materials
Bar code function enabled to check the source of raw materials
Configured with SCADA interface to monitor the machine status in SCADA
Equipped with an electric mixer to prevent the grinding liquid from settling and cakingChemical VMB features:
Structure injection molding of FR PP/FM4910
100% leak proof design
Transparent front cover and sealed pocket handle
Quick opening/closing system
Raised front panel structure
The electrical junction box can be installed on the top or either side of the VMB
No detention area and 100% evacuation capacity
Sufficient internal space for manifolds and piping system installation
Configured with 4 to 12 exits
Fast turnaround delivery time
Consistent process
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Category:
Products
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Contact us
Address: No. 889 Zhonghua Road, Bacheng Town, Kunshan City,
Jiangsu Province, China
Customer service hotline：
0512-57762325 0512-55239392
Fax：0512-55239392
Website：www.kszcauto.cn
E-mail：zcauto@yeah.net
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