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Slurry Dispense System (Local)

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Slurry Dispense System (Local)

  • Description
  • Can be installed in Sub-Fab or adjacent to CMP equipment area

    Meet the mixing acid and supply requirements of grinding fluid

    feature design: 
    Redundant pump and tank design, providing uninterrupted mixing/supply function
    Redundant filter design allows replacement and maintenance of filter elements without interrupting system supply
    Conductivity meter to detect the quality of mixed acid
    High-precision H202 scale, providing higher mixed acid quality
    Double raw material barrel and double pump design to ensure uninterrupted supply of raw materials
    The Bar Code function checks the source of raw materials
    Provide a functional interface that can be output to SCADA, and can monitor the status of the machine in SCADA

    The raw material barrel can be equipped with an electric mixer to avoid precipitation and agglomeration of the grinding liquid

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