
PRODUCTS
Slurry Dispense System (Local)
- Description
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Can be installed in Sub-Fab or adjacent to CMP equipment area
Meet the mixing acid and supply requirements of grinding fluid
feature design:
Redundant pump and tank design, providing uninterrupted mixing/supply function
Redundant filter design allows replacement and maintenance of filter elements without interrupting system supply
Conductivity meter to detect the quality of mixed acid
High-precision H202 scale, providing higher mixed acid quality
Double raw material barrel and double pump design to ensure uninterrupted supply of raw materials
The Bar Code function checks the source of raw materials
Provide a functional interface that can be output to SCADA, and can monitor the status of the machine in SCADAThe raw material barrel can be equipped with an electric mixer to avoid precipitation and agglomeration of the grinding liquid
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