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Chemical VMB Assembly

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Chemical VMB Assembly

  • Description

  • Applications:
    Installed in sub-fab and CMP nearby zone
    Acid mixing and supply of grinding fluid
    Configurations
    Redundant pump and tank design, providing uninterrupted mixing/supply function
    Redundant filter design, which supports filter change and maintenance without system offline
    Detection of mixed acid quality with conductivity meter
    High precision H202 scale, providing higher quality of mixed acid
    Double raw material barrels and double pumps design, ensure the stable supply of raw materials
    Bar code function enabled to check the source of raw materials
    Configured with SCADA interface to monitor the machine status in SCADA
    Equipped with an electric mixer to prevent the grinding liquid from settling and caking

    Chemical VMB features:
    Structure injection molding of FR PP/FM4910
    100% leak proof design
    Transparent front cover and sealed pocket handle
    Quick opening/closing system
    Raised front panel structure
    The electrical junction box can be installed on the top or either side of the VMB
    No detention area and 100% evacuation capacity
    Sufficient internal space for manifolds and piping system installation
    Configured with 4 to 12 exits
    Fast turnaround delivery time
    Consistent process

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