Dry Exhaust Treater
The dry exhaust gas processor mainly uses adsorbents to absorb the exhaust gas generated in the semiconductor process, so that it can meet the national emission standards. The adsorbent in the adsorption cylinder can effectively absorb the toxic corrosive gas generated in the equipment in the semiconductor manufacturing process. The pressure difference generated is fed back to the control system by the pressure gauge, and the control system responds and automatically switches to the auxiliary adsorption cylinder, thereby eliminating the toxic corrosion gas. Gas absorption treatment. Adsorbed gases include SiHCl3, B2H6, PH3, AsH3, H2S, CO, CO2, SO2, CS2, CL4, H2CCL2 acetone, ethanol, benzene, toluene, styrene, odorous substances, etc. The processing efficiency is very high, the highest processing efficiency can reach 98%.